Propylene glycol methyl ether acetate

Propylene glycol methyl ether acetate
Names
IUPAC name
1-Methoxy-2-propanyl acetate
Other names
PGMEA; 1-Methoxy-2-propanol acetate
Identifiers
108-65-6 YesY
3D model (Jmol) Interactive image
ChemSpider 7658
ECHA InfoCard 100.003.277
PubChem 7946
UNII PA7O2U6S2Q YesY
Properties
C6H12O3
Molar mass 132.16 g·mol−1
Hazards
Template:H226, Template:H360 , Template:H402
NFPA 704
Flammability code 2: Must be moderately heated or exposed to relatively high ambient temperature before ignition can occur. Flash point between 38 and 93 °C (100 and 200 °F). E.g., diesel fuel Health code 1: Exposure would cause irritation but only minor residual injury. E.g., turpentine Reactivity code 0: Normally stable, even under fire exposure conditions, and is not reactive with water. E.g., liquid nitrogen Special hazards (white): no codeNFPA 704 four-colored diamond
2
1
0
Flash point 43 °C (109 °F; 316 K)
333 °C (631 °F; 606 K)
Except where otherwise noted, data are given for materials in their standard state (at 25 °C [77 °F], 100 kPa).
Infobox references

Propylene glycol methyl ether acetate (PGMEA, 1-methoxy-2-propanol acetate) is a P-type glycol ether used in inks, coatings, and cleaners. It is sold by Dow Chemical under the name Dowanol PMA[1] and by Shell Chemical under the name methyl proxitol acetate.[2][3]

In the semiconductor industry, PGMEA is a commonly used solvent, primarily for the application of surface adherents such as Bis(trimethylsilyl)amine (HMDS) on silicon wafers.[4] The compound is often the most abundant airborne, molecular contamination (AMC) in semiconductor cleanrooms,[5] due to its evaporation into ambient air.

Vapor Pressure Curve for PGMEA vs. Water

References

  1. ↑ http://www.dow.com/scripts/litorder.asp?filepath=oxysolvents/pdfs/noreg/110-00588.pdf
  2. ↑ http://s00.static-shell.com/content/dam/shell/static/chemicals/downloads/responsible-energy/methylproxitol-pgmemethylproxitolacetatepgmeaproductstewardships.pdf
  3. ↑ "Methyl PROXITOL".
  4. ↑ "HMDS primer (hexamethyldisilazane), DEATS and PGMEA".
  5. ↑ http://www.balazs.com/file/otherelement/pj/1_amc_guidelines_rev2.34642.pdf
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